Patent Assignment
Reel/Frame 036279/0986
Assignment of Assignor's Interest
Recorded: 2015-08-07
Pages: 6
Assignors
LEE, SU-YOUNG
Executed: 2015-04-13
KIM, TAE-GUEN
Executed: 2015-04-13
DOH, JONG-GUL
Executed: 2015-04-13
Assignee
SAMSUNG ELECTRONICS CO., LTD
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Method, Photolithography Method, and Method of Manufacturing a Semiconductor Device Using a Pellicle Film