Patent Assignment
Reel/Frame 036293/0705
Assignment of Assignor's Interest
Recorded: 2015-08-11
Pages: 6
Assignors
KAWABATA, KATSUHIKO
Executed: 2015-06-30
HAYASHI, TAKUMA
Executed: 2015-06-30
IKEUCHI, MITSUMASA
Executed: 2015-06-30
LEE, SUNGJAE
Executed: 2015-06-30
KUNIKA, JIN
Executed: 2015-06-30
Assignee
IAS INC.
4-39-5-916, FUJIMIDAI, KUNITACHI-SHI, TOKYO, 186-0003, JAPAN
Covered Property
(1)
Substrate Etching Apparatus and Substrate Analysis Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.