Patent Assignment
Reel/Frame 036309/0157
Assignment of Assignor's Interest
Recorded: 2015-08-12
Pages: 3
Assignor
MOROI, MASAYUKI
Executed: 2015-08-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Raw Material Gas Supply Apparatus