Patent Assignment
Reel/Frame 036311/0150
Assignment of Assignor's Interest
Recorded: 2015-08-12
Pages: 3
Assignor
TAKIMOTO, YUUJI
Executed: 2015-08-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method