Patent Assignment
Reel/Frame 036331/0868
Assignment of Assignor's Interest
Recorded: 2015-08-14
Pages: 3
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Selective Contact Etch for Unmerged Epitaxial Source/Drain Regions