Patent Assignment
Reel/Frame 036333/0378
Assignment of Assignor's Interest
Recorded: 2015-08-14
Pages: 3
Assignor
YAMADA, HIROSHI
Executed: 2015-08-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Wafer Inspection Apparatus