Patent Assignment
Reel/Frame 036346/0359
Assignment of Assignor's Interest
Recorded: 2015-08-18
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method