Patent Assignment
Reel/Frame 036363/0126
Assignment of Assignor's Interest
Recorded: 2015-08-19
Pages: 3
Assignors
SHCHEGROV, ANDREI V.
Executed: 2015-08-11
DZIURA, THADDEUS GERARD
Executed: 2015-07-13
PANDEV, STILIAN IVANOV
Executed: 2015-08-05
POSLAVSKY, LEONID
Executed: 2015-07-02
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Signal Response Metrology Based On Measurements Of Proxy Structures