Patent Assignment
Reel/Frame 036366/0082
Assignment of Assignor's Interest
Recorded: 2015-08-19
Pages: 5
Assignors
KAMP, TOM
Executed: 2015-08-19
RASTGAR, NEEMA
Executed: 2015-08-19
DRYMON, MICHAEL CARL
Executed: 2015-08-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Self Limiting Lateral Atomic Layer Etch