Patent Assignment
Reel/Frame 036380/0618
Assignment of Assignor's Interest
Recorded: 2015-08-20
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Trench Liner for Removing Impurities in a Non-Copper Trench