Patent Assignment
Reel/Frame 036395/0421
Assignment of Assignor's Interest
Recorded: 2015-08-19
Pages: 4
Assignors
SHCHEGROV, ANDREI V.
Executed: 2015-06-11
PANDEV, STILIAN IVANOV
Executed: 2015-08-05
MADSEN, JONATHAN M.
Executed: 2015-08-11
KUZNETSOV, ALEXANDER
Executed: 2015-05-11
MIEHER, WALTER DEAN
Executed: 2015-06-10
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Signal Response Metrology for Scatterometry Based Overlay Measurements