Patent Assignment
Reel/Frame 036414/0740
Assignment of Assignor's Interest
Recorded: 2015-08-25
Pages: 3
Assignor
KUEHN, BODO
Executed: 2015-07-20
Assignee
HERAEUS QUARZGLAS GMBH & CO. KG
QUARZSTRASSE 8, HANAU, 63450, GERMANY
Covered Property
(1)
OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ArF EXCIMER LASER LITHOGRAPHY AND METHOD FOR PRODUCING THE COMPONENT