Patent Assignment
Reel/Frame 036427/0366
Assignment of Assignor's Interest
Recorded: 2015-08-26
Pages: 6
Assignors
FUJIWARA, TAKAYUKI
Executed: 2015-07-22
SAGEHASHI, MASAYOSHI
Executed: 2015-07-22
HASEGAWA, KOJI
Executed: 2015-07-22
OIKAWA, KENICHI
Executed: 2015-07-22
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process