Patent Assignment
Reel/Frame 036447/0928
Assignment of Assignor's Interest
Recorded: 2015-08-28
Pages: 2
Assignor
MIZOGUCHI, HIRONORI
Executed: 2015-08-21
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHIN SUGITA CHO, ISOGO-KU, YOKOHAMA, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Method for Correcting Drift of Accelerating Voltage, Method for Correcting Drift of Charged Particle Beam, and Charged Particle Beam Writing Apparatus