Patent Assignment
Reel/Frame 036450/0496
Assignment of Assignor's Interest
Recorded: 2015-08-28
Pages: 8
Assignors
YAMAMOTO, RYUJI
Executed: 2015-08-20
KAMAKURA, TSUKASA
Executed: 2015-08-27
HIROSE, YOSHIRO
Executed: 2015-08-28
SHIMAMOTO, SATOSHI
Executed: 2015-08-27
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.