Patent Assignment
Reel/Frame 036450/0614
Assignment of Assignor's Interest
Recorded: 2015-08-28
Pages: 7
Assignors
TAKAHASHI, AKIRA
Executed: 2015-08-25
YASUI, TAKESHI
Executed: 2015-08-25
OGAWA, HIROYUKI
Executed: 2015-08-25
NABETA, KAZUYA
Executed: 2015-08-25
MATSUURA, NAOYA
Executed: 2015-08-25
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.