Patent Assignment
Reel/Frame 036468/0215
Assignment of Assignor's Interest
Recorded: 2015-09-01
Pages: 5
Assignors
GRENOUILLET, LAURENT
Executed: 2015-07-07
VINET, MAUD
Executed: 2015-07-07
WACQUEZ, ROMAIN
Executed: 2015-06-09
Assignee
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
25 RUE LEBLANC, BATIMENT "LE PONANT D", PARIS, 75015, FRANCE
Covered Property
(1)
Method of Etching a Crystalline Semiconductor Material by Ion Implantation and Then Chemical Etching Based on Hydrogen Chloride