Patent Assignment
Reel/Frame 036469/0815
Assignment of Assignor's Interest
Recorded: 2015-09-01
Pages: 3
Assignors
WANG, HSUEH-LEI
Executed: 2015-08-25
WANG, JEN-TI
Executed: 2015-08-25
WANG, TING-WEI
Executed: 2015-08-25
TSOU, WEN-CHIEH
Executed: 2015-08-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Cleaning Load Port of Wafer Processing Apparatus