Patent Assignment
Reel/Frame 036475/0531
Assignment of Assignor's Interest
Recorded: 2015-09-02
Pages: 6
Assignors
PARK, HAEJOONG
Executed: 2015-05-11
KIM, HONGMYOUNG
Executed: 2015-05-11
BAEK, KYE HYUN
Executed: 2015-05-11
PARK, SANGKYU
Executed: 2015-05-11
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Electrostatic Chuck Assemblies Capable of Bidirectional Flow of Coolant and Semiconductor Fabricating Apparatus Having the Same