Patent Assignment
Reel/Frame 036491/0316
Assignment of Assignor's Interest
Recorded: 2015-09-03
Pages: 2
Assignor
MORIGUCHI, NAOKI
Executed: 2015-07-10
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Plasma Etching Method, Plasma Etching Device, Plasma Processing Method, and Plasma Processing Device