Patent Assignment
Reel/Frame 036494/0271
Assignment of Assignor's Interest
Recorded: 2015-09-04
Pages: 4
Assignors
FUJIWARA, NAOZUMI
Executed: 2015-08-17
EDO, TORU
Executed: 2015-08-11
SUGAHARA, YUJI
Executed: 2015-08-11
ANO, SEIJI
Executed: 2015-08-11
SAWASHIMA, JUN
Executed: 2015-08-12
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method