Patent Assignment
Reel/Frame 036519/0485
Assignment of Assignor's Interest
Recorded: 2015-09-09
Pages: 2
Assignor
RICHARDSON, BRETT C
Executed: 2015-09-08
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Wear Detection of Consumable Part in Semiconductor Manufacturing Equipment