Patent Assignment
Reel/Frame 036524/0052
Assignment of Assignor's Interest
Recorded: 2015-09-09
Pages: 3
Assignors
ASAKURA, RYOJI
Executed: 2015-07-08
TAMAKI, KENJI
Executed: 2015-07-08
SHIRAISHI, DAISUKE
Executed: 2015-07-14
KAGOSHIMA, AKIRA
Executed: 2015-07-14
INOUE, SATOMI
Executed: 2015-07-14
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Plasma Processing Method and Plasma Processing Analysis Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.