Patent Assignment
Reel/Frame 036531/0290
Assignment of Assignor's Interest
Recorded: 2015-09-10
Pages: 3
Assignors
KRISHNAN, SHANKAR
Executed: 2015-09-08
ZHUANG, GUORONG V.
Executed: 2015-08-24
WANG, DAVID Y.
Executed: 2015-08-24
LIU, XUEFENG
Executed: 2015-08-24
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optical Metrology With Reduced Focus Error Sensitivity