Patent Assignment
Reel/Frame 036536/0889
Assignment of Assignor's Interest
Recorded: 2015-09-10
Pages: 3
Assignor
LILL, THORSTEN
Executed: 2015-09-08
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Integrating Atomic Scale Processes: Ald (Atomic Layer Deposition) and Ale (Atomic Layer Etch)
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jul 8, 2015
From: MARKS, JEFFREY; YANG, WENBING; KIM, TAESEUNG; LILL, THORSTEN
To: LAM RESEARCH CORPORATION
Reel/Frame 036034/0048 →
Assignment of Assignor's Interest
Aug 26, 2015
From: KANARIK, KEREN JACOBS; SINGH, HARMEET; KIM, TAESEUNG
To: LAM RESEARCH CORPORATION
Reel/Frame 036431/0042 →