Patent Assignment
Reel/Frame 036546/0476
Assignment of Assignor's Interest
Recorded: 2015-09-11
Pages: 5
Assignors
WATANABE, KAZUHIRO
Executed: 2015-06-29
TAKAHASHI, YUUJI
Executed: 2015-06-29
UENO, YUSUKE
Executed: 2015-06-29
Assignee
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
1-1, OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, 141-6025, JAPAN
Covered Property
(1)
Ion Implanter and Method of Ion Beam Tuning