Patent Assignment
Reel/Frame 036548/0133
Assignment of Assignor's Interest
Recorded: 2015-09-12
Pages: 2
Assignors
TAMARI, NANAKO
Executed: 2015-07-27
MORIMOTO, MICHIKAZU
Executed: 2015-07-27
YASUI, NAOKI
Executed: 2015-07-27
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.