Patent Assignment
Reel/Frame 036548/0143
Assignment of Assignor's Interest
Recorded: 2015-09-12
Pages: 2
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Application:
14/852,127 →
Publication:
US 2016/0217980