Patent Assignment
Reel/Frame 036565/0370
Assignment of Assignor's Interest
Recorded: 2015-09-15
Pages: 3
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Treating Apparatus and Substrate Treatment Method for Discharging Treatment Solution from Nozzle to Substrate