Patent Assignment
Reel/Frame 036579/0074
Assignment of Assignor's Interest
Recorded: 2015-09-16
Pages: 5
Assignors
TACHIBANA, SEIICHIRO
Executed: 2015-08-10
TANEDA, YOSHINORI
Executed: 2015-08-10
KIKUCHI, RIE
Executed: 2015-08-10
OGIHARA, TSUTOMU
Executed: 2015-08-11
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Composition for Forming a Coating Type Silicon-Containing Film, Substrate, and Patterning Process