Patent Assignment
Reel/Frame 036581/0313
Assignment of Assignor's Interest
Recorded: 2015-09-16
Pages: 3
Assignors
SAKIYAMA, YUKINORI
Executed: 2015-09-09
RANGINENI, YASWANTH
Executed: 2015-09-10
TUCKER, JEREMY
Executed: 2015-09-11
KEIL, DOUGLAS
Executed: 2015-09-10
AUGUSTYNIAK, EDWARD
Executed: 2015-09-14
KAPOOR, SUNIL
Executed: 2015-09-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the Metrology for Station-to-Station and Tool-to-Tool Matching