Patent Assignment
Reel/Frame 036595/0306
Assignment of Assignor's Interest
Recorded: 2015-09-17
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Alignment Apparatus and Substrate Processing Apparatus