Patent Assignment
Reel/Frame 036603/0103
Assignment of Assignor's Interest
Recorded: 2015-09-18
Pages: 5
Assignors
VAN SCHOOT, JAN BERNARD PLECHELMUS
Executed: 2015-09-01
DE VRIES, GOSSE CHARLES
Executed: 2015-08-31
VAN INGEN SCHENAU, KOEN
Executed: 2015-08-24
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method with Corrective Positioning of Reflective Element