Patent Assignment
Reel/Frame 036613/0275
Assignment of Assignor's Interest
Recorded: 2015-09-21
Pages: 3
Assignors
WENG, MING-HUEI
Executed: 2015-09-02
CHANG, CHING-YU
Executed: 2015-09-14
CHEN, CHUN-KUANG
Executed: 2015-09-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6,, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method to Define Multiple Layer Patterns Using Double Exposures