Patent Assignment
Reel/Frame 036617/0272
Assignment of Assignor's Interest
Recorded: 2015-09-22
Pages: 9
Assignors
RUOFF, JOHANNES
Executed: 2015-07-21
SAENGER, INGO
Executed: 2015-07-21
ZIMMERMANN, JOERG
Executed: 2015-07-21
KRAEHMER, DANIEL
Executed: 2015-07-24
HENNERKES, CHRISTOPH
Executed: 2015-07-24
SCHLESENER, FRANK
Executed: 2015-08-11
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System for an Euv Lithography Device and Facet Mirror Therefor