Patent Assignment
Reel/Frame 036620/0109
Assignment of Assignor's Interest
Recorded: 2015-09-22
Pages: 9
Assignors
BUSCHE, MATTHEW
Executed: 2015-06-24
BOYD, WENDELL, JR.
Executed: 2015-06-24
EGAN, TODD J.
Executed: 2015-06-25
KIRK, GREGORY L.
Executed: 2015-06-25
PARKHE, VIJAY D.
Executed: 2015-07-15
RICE, MICHAEL R.
Executed: 2015-07-06
VOLFOVSKI, LEON
Executed: 2015-06-24
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus, Systems, and Methods for Temperature Control of Substrates Using Embedded Fiber Optics and Epoxy Optical Diffusers