Patent Assignment
Reel/Frame 036628/0364
Assignment of Assignor's Interest
Recorded: 2015-09-23
Pages: 3
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, NL-1322 AP, NETHERLANDS
Covered Property
(1)
Combination CVD/ALD method, source and pulse profile modification