Patent Assignment
Reel/Frame 036628/0514
Assignment of Assignor's Interest
Recorded: 2015-09-23
Pages: 7
Assignors
MUSSELMAN, MARCUS
Executed: 2015-09-21
VALDIVIA, JUAN
Executed: 2015-09-20
XIANG, HUA
Executed: 2015-09-18
BAILEY, ANDREW D.
Executed: 2015-09-17
YAMAGUCHI, YOKO
Executed: 2015-09-18
FU, QIAN
Executed: 2015-09-21
EPPLER, AARON
Executed: 2015-09-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System and Method for Determining Field Non-Uniformities of a Wafer Processing Chamber Using a Wafer Processing Parameter