Patent Assignment
Reel/Frame 036628/0569
Assignment of Assignor's Interest
Recorded: 2015-09-23
Pages: 4
Assignors
ZHANG, TAO
Executed: 2015-05-09
WALDMANN, OLE
Executed: 2015-05-08
PAPE, ERIC A.
Executed: 2015-05-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System and Method for Reducing Temperature Transition in an Electrostatic Chuck