Patent Assignment
Reel/Frame 036628/0646
Assignment of Assignor's Interest
Recorded: 2015-09-23
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Calibrating Scalar Field Contribution Values for a Limited Number of Sensors Including a Temperature Value of an Electrostatic Chuck and Estimating Temperature Distribution Profiles Based on Calibrated Values