Patent Assignment
Reel/Frame 036628/0857
Assignment of Assignor's Interest
Recorded: 2015-09-23
Pages: 4
Assignors
WU, BENNY
Executed: 2015-05-21
PAPE, ERIC A.
Executed: 2015-05-20
GAFF, KEITH WILLIAM
Executed: 2015-05-22
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Auto-Correction of Electrostatic Chuck Temperature Non-Uniformity