Assignment of Assignor's Interest

Recorded: 2015-09-23 Pages: 4

Assignors

BAILEY, ANDREW D., III

Executed: 2015-09-18

CARBERY, MARCUS

Executed: 2015-09-22

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538

Covered Property (1)

Flexible Temperature Compensation Systems and Methods for Substrate Processing Systems

Patent: 9,864,361 →

Application: 14/862,789 →

Publication: US 2016/0370788