Patent Assignment
Reel/Frame 036648/0866
Assignment of Assignor's Interest
Recorded: 2015-09-24
Pages: 3
Assignors
SPOONER, TERRY A.
Executed: 2015-09-24
WANG, WEI
Executed: 2015-09-24
YANG, CHIH-CHAO
Executed: 2015-09-24
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Multiple Pre-Clean Processes for Interconnect Fabrication