Patent Assignment
Reel/Frame 036654/0037
Assignment of Assignor's Interest
Recorded: 2015-09-25
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Self-Aligned Patterning Using Directed Self-Assembly of Block Copolymers