Patent Assignment
Reel/Frame 036660/0827
Assignment of Assignor's Interest
Recorded: 2015-09-25
Pages: 8
Assignors
FUKUSHIMA, MAKOTO
Executed: 2015-09-18
YASUDA, HOZUMI
Executed: 2015-09-18
NAMIKI, KEISUKE
Executed: 2015-09-18
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method