Patent Assignment
Reel/Frame 036688/0708
Assignment of Assignor's Interest
Recorded: 2015-09-30
Pages: 3
Assignors
VAN DER ZOUW, GERBRAND
Executed: 2014-11-20
JAK, MARTIN JACOBUS JOHAN
Executed: 2014-11-20
EBERT, MARTIN
Executed: 2014-11-20
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method