Patent Assignment
Reel/Frame 036692/0981
Assignment of Assignor's Interest
Recorded: 2015-09-30
Pages: 8
Assignors
AMIYA, MICHITAKA
Executed: 2015-09-04
SATOH, TAKAMI
Executed: 2015-09-14
ESHIMA, KAZUYOSHI
Executed: 2015-09-08
NAKAMURA, AKIHIRO
Executed: 2015-09-07
TANAKA, KOJI
Executed: 2015-09-07
KOSAI, KAZUKI
Executed: 2015-09-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Flow-Rate Regulator Device, Diluted Chemical-Liquid Supply Device, Liquid Processing Apparatus and Its Operating System