Patent Assignment
Reel/Frame 036696/0188
Assignment of Assignor's Interest
Recorded: 2015-09-30
Pages: 4
Assignors
ITO, YUSAKU
Executed: 2015-09-04
YANO, HIROHIDE
Executed: 2015-09-04
YAGUCHI, TOMOYUKI
Executed: 2015-09-04
Assignee
DISCO CORPORATION
13-11, OMORI-KITA 2-CHOME, OTA-KU,, TOKYO, 143-8580, JAPAN
Covered Property
(1)
Wafer Inspection Method and Wafer Inspection Apparatus