Patent Assignment
Reel/Frame 036697/0527
Assignment of Assignor's Interest
Recorded: 2015-09-30
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Systems and Methods for Esc Temperature Control