Patent Assignment
Reel/Frame 036714/0619
Assignment of Assignor's Interest
Recorded: 2015-10-02
Pages: 4
Assignors
KAWAMURA, KOHEI
Executed: 2015-09-10
KOBAYASHI, YASUO
Executed: 2015-09-15
NOZAWA, TOSHIHISA
Executed: 2015-09-24
ISHIBASHI, KIYOTAKA
Executed: 2015-09-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Placing Bed Structure, Treating Apparatus Using the Structure, and Method for Using the Apparatus